Mitsubishi Chemical and Xanadu are collaborating to address a key challenge in advanced chip manufacturing: radiation-induced blurring during extreme ultraviolet (EUV) lithography. This quantum phenomenon hinders classical simulations, creating a bottleneck for producing the powerful chips used in mobile devices, artificial intelligence, and advanced computing.
In phase one, the companies demonstrated quantum algorithms accurately model the optical properties of photoresists used in EUV lithography; now, with support from Canadian and Japanese innovation programs, they aim to build a fault-tolerant quantum computing software pipeline. “Our collaboration with Mitsubishi bridges quantum simulation and semiconductor fabrication, eliminating a critical manufacturing bottleneck,” said Dr. Christian Weedbrook, Founder and Chief Executive Officer of Xanadu.
Quantum Algorithms Model EUV Lithography Blur in Semiconductor Fabrication
The efficiency of extreme ultraviolet (EUV) lithography, a cornerstone of modern chip manufacturing for mobile devices, artificial intelligence systems, and advanced computing, is increasingly reliant on overcoming limitations imposed by quantum effects. Radiation-induced blurring during EUV lithography presents a significant hurdle for classical computer simulations, hindering the development of more powerful semiconductors. Xanadu Quantum Technologies and Mitsubishi Chemical are collaborating to address this challenge by leveraging quantum algorithms to model the behavior of materials used in the process.
This partnership, bolstered by funding from the National Research Council of Canada Industrial Research Assistance Program and Japan’s Strategic Innovation Promotion Program, builds upon initial successes in accurately modeling the optical properties of photoresists. These photoresists are crucial for etching the intricate patterns onto silicon wafers. The next phase focuses on integrating parameters derived from Xanadu’s quantum simulations directly into Mitsubishi’s existing multi-scale models, aiming to predict and mitigate the blurring effect.
The ultimate goal is to create a fault-tolerant quantum computing-ready software pipeline capable of identifying materials that resist blurring. Dr. Qi Gao, Distinguished Scientist at Mitsubishi Chemical Corporation, explained that this partnership “expands on Mitsubishi’s previous collaboration with Xanadu, where we demonstrated the utility of quantum computing in simulating EUV resist materials for semiconductor manufacturing.” This joint effort between Canadian and Japanese expertise seeks to advance semiconductor technology and demonstrate the potential of quantum computing for real-world industrial applications, with Dr. Masahiro Horibe of AIST stating, “This project is a great example of connecting quantum computing research with real industrial challenges.”
This partnership expands on Mitsubishi’s previously successful collaboration with Xanadu, where we demonstrated the utility of quantum computing in simulating EUV resist materials for semiconductor manufacturing.
Dr. Qi Gao, Distinguished Scientist, Analysis Technology Laboratory, Mitsubishi Chemical Corporation
Canada-Japan Programs Support Xanadu & Mitsubishi’s FTQC Software Pipeline
National innovation programs in Canada and Japan are now supporting a collaborative effort between Xanadu Quantum Technologies and Mitsubishi Chemical to refine semiconductor fabrication through quantum computing. Xanadu intends to demonstrate a clear pathway for quantum computing’s contribution to EUV resist material development through this work, the company says. “With support from national innovation programs and research organizations in both countries, we’re excited to bring together Canadian and Japanese expertise in quantum computing and materials science,” said Dr.
This project is a great example of connecting cutting-edge quantum computing research with real industrial challenges. In the critical field of semiconductor materials development, we expect this Japan-Canada collaboration to accelerate the real-world implementation of quantum technology.
Dr. Masahiro Horibe, Sub-Program Director, Cross-ministerial SIP and Deputy Director, G-QuAT, AIST
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