Xanadu and Mitsubishi Chemical win funding for quantum chip research

Radiation-induced blurring, a quantum phenomenon, is a major obstacle to simulating extreme ultraviolet (EUV) lithography, a crucial process for manufacturing chips used in mobile devices, artificial intelligence, and advanced computing. Xanadu Quantum Technologies and Mitsubishi Chemical are collaborating to address this challenge using quantum algorithms and have secured new funding from the Canadian and Japanese governments to scale their work.

In phase one, the companies demonstrated that quantum algorithms accurately model the optical properties of photoresists used in EUV lithography; now, they aim to develop a production-ready workflow. “Our collaboration with Mitsubishi bridges quantum simulation and semiconductor fabrication, eliminating a critical manufacturing bottleneck and securing a competitive advantage for semiconductor technology,” said Dr. Christian Weedbrook, Founder and Chief Executive Officer of Xanadu.

Quantum Algorithms Model EUV Lithography Blur in Semiconductor Fabrication

EUV lithography, the cornerstone of modern chip manufacturing, currently relies on increasingly complex and computationally expensive classical simulations to mitigate radiation-induced blurring. This quantum phenomenon presents a significant hurdle, but a collaborative effort between Xanadu Quantum Technologies and Mitsubishi Chemical is leveraging quantum algorithms to model and ultimately reduce this effect. The partnership has secured additional funding from both Canadian and Japanese national innovation programs to scale their work, aiming to integrate quantum simulations directly into Mitsubishi’s existing semiconductor models, the company says.

This next phase builds upon initial successes where the companies demonstrated the ability of quantum algorithms to accurately represent the optical properties of photoresists, materials crucial for etching lithographic patterns. The current focus is on developing a production-ready workflow that will utilize parameters derived from Xanadu’s quantum computing simulations to predict and minimize blur.

Xanadu intends to deliver a demonstration and roadmap illustrating how quantum computing can contribute to the advancement of EUV resist materials through this joint effort. The National Research Council of Canada Industrial Research Assistance Program (NRC IRAP) and Japan’s Strategic Innovation Promotion Program (SIP) are providing financial support for this undertaking. This collaboration strengthens research and business ties between Canada and Japan in the technology sector.

Dr. Qi Gao, Senior Chief Scientist at Mitsubishi Chemical, added, “This partnership expands on Mitsubishi’s previous collaboration with Xanadu, where we demonstrated the utility of quantum computing in simulating EUV resist materials for semiconductor manufacturing.” Dr. Masahiro Horibe, Sub-Program Director, Cross-ministerial SIP and Deputy Director, G-QuAT, AIST, emphasized the project’s broader impact, stating, “This project connects quantum computing research with real industrial challenges. In the field of semiconductor materials development, we expect this Japan-Canada collaboration to accelerate the implementation of quantum technology.

At SIP, we look forward to the new industrial value this initiative will create.” This combined effort aims to establish a blueprint for quantum-driven material discovery and unlock commercial value for early fault-tolerant quantum computing systems, ultimately shaping the future of global semiconductor fabrication.