Virginia Tech’s semiconductor processing has taken a quantum leap forward thanks to a $3 million gift-in-kind from SPTS Technologies, driven by its CEO at the time, Kevin T. Crofton ’82. The generous donation has revitalized the university’s Micro/Nanofabrication Cleanroom and Laboratory, equipping it with state-of-the-art equipment for advanced research and collaborations.
The revamped facility boasts cutting-edge instruments such as a JEOL JBX 8100FS Electron Beam Lithography System, a Kurt J. Lesker plasma-enhanced atomic layer deposition system, and a DELTA PECVD chemical vapor deposition tool. These technologies will enable researchers to craft intricate nanostructures with unprecedented accuracy, unlocking the potential for transformative breakthroughs in quantum computing, nanophotonics, and microelectronics.
According to Wei Zhou, faculty director for the clean room and associate professor in the Bradley Department of Electrical and Computer Engineering, this partnership exemplifies a shared commitment to pushing the boundaries of knowledge and nurturing the next generation of leaders.
Revamping Semiconductor Fabrication: A Quantum Leap at Virginia Tech
The field of semiconductor fabrication has taken a significant step forward at Virginia Tech, thanks to a $3 million gift-in-kind from SPTS Technologies. This generous donation has enabled the university to revamp and modernize its Micro/Nanofabrication Cleanroom and Laboratory, positioning it as a hub for advanced research and innovation in the field.
A State-of-the-Art Facility
The clean room, established in 2006 as the Micron Technology Semiconductor Processing Laboratory, is a cutting-edge facility that boasts an array of machines for etching, thermal treatment, and device packaging. The new equipment includes a JEOL JBX 8100FS Electron Beam Lithography System, a Kurt J. Lesker plasma-enhanced atomic layer deposition system, a DELTA PECVD chemical vapor deposition tool, and two separate material etchers: the OMEGA ICP etcher and the Rapier DRIE.
The facility has undergone significant upgrades, including modernization of the ventilation, gas delivery, and water-cooling systems. These systems are essential for maintaining stable temperatures, pristine air filtration, and ventilation needed for the delicate fabrication of semiconductors.
Empowering Researchers and Students
The electron beam lithography system is expected to play a crucial role in driving innovation in fields such as quantum computing, nanophotonics, and microelectronics. This instrument enables researchers to craft intricate nanostructures with unprecedented accuracy, unlocking the potential for transformative breakthroughs.
The clean room will serve as a training ground for the next generation of innovators, equipping them with the skills and knowledge to make a real difference in the world. Southwest Virginia high school students have already had the opportunity to explore the clean room as part of the UPWARDS 2024 summer camp, which aims to encourage young women to join the semiconductor industry.
A Quantum Leap in Research Capabilities
The presence of such powerful tools on campus represents a quantum leap in research capabilities, according to Wei Zhou, faculty director for the clean room and associate professor in the Bradley Department of Electrical and Computer Engineering. The clean room fosters a collaborative ecosystem, aiming to accelerate innovation, drive economic growth, and address critical challenges in society.
The partnership between SPTS Technologies and Virginia Tech exemplifies a shared commitment to pushing the boundaries of knowledge and nurturing the next generation of leaders. It is expected to ignite a spark of inspiration in students, demonstrating the transformative power of investing in one’s community.
External Link: Click Here For More
